Author Details
Prawara, Budi, Research Centre for Electrical Power & Mechatronics, Indonesian Institute of Sciences, Komp LIPI Jl Cisitu 21/54D, Gd 20, Bandung 40135, Indonesia
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Vol 3, No 2 (2012) - Article
A Review of Atomic Layer Deposition for Nanoscale Devices
Abstract PDF
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